Pattern Delineation of Deep Trench Arrays on Polished Silicon Surfaces Employing Contrast-photoresists Lithography- Deep Trench Patterning
Jamil Akhtar, Sujit Nayak, Shilpi Pandey, Himani Sharma, Vibhor Kumar, Raviraj Bhatia
Abstract | References Full Paper: PDF (Size:601KB), PP.17-23, Pub. Date: 2013-04 Downloads: 41
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